Assignee
ICHINOSE GO
JP·4 granted patents·1 pending application·15 citations·filing 2010–2012
Top patents by PatentIndex Score
5 records- 0191US8472008B2Movable body apparatus, exposure apparatus and device manufacturing methodICHINOSE GO·Filed 2010·Granted Jun 25, 2013·10 cites·17 claims
- 0283US8294878B2Exposure apparatus and device manufacturing methodICHINOSE GO·Filed 2010·Granted Oct 23, 2012·5 cites·27 claims
- 0341US8841065B2Manufacturing method of exposure apparatus and device manufacturing methodICHINOSE GO·Filed 2011·Granted Sep 23, 2014·0 cites·68 claims
- 0437US8446569B2Exposure apparatus, exposure method and device manufacturing methodICHINOSE GO·Filed 2010·Granted May 21, 2013·0 cites·113 claims
- 0537US2013057837A1Exposure apparatus, exposure method, device-manufacturing method, program, and recording mediumICHINOSE GO·Filed 2012·Application pending·0 cites
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