Assignee
HITACHI HIGH TECH ELECT ENG CO
JP·11 granted patents·247 citations·filing 2001–2003
Top patents by PatentIndex Score
11 records- 0191US6894302B2Surface inspection apparatus and method thereofHITACHI HIGH TECH ELECT ENG CO·Filed 2001·Granted May 17, 2005·35 cites·7 claims
- 0290US6888959B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI HIGH TECH ELECT ENG CO·Filed 2001·Granted May 3, 2005·38 cites·20 claims
- 0388US6897956B2Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor deviceHITACHI HIGH TECH ELECT ENG CO·Filed 2002·Granted May 24, 2005·37 cites·21 claims
- 0486US6821906B2Method and apparatus for treating surface of substrate plateHITACHI HIGH TECH ELECT ENG CO·Filed 2001·Granted Nov 23, 2004·43 cites·5 claims
- 0585US6894489B2Testing apparatus for conducting a test on a magnetic recording medium or a magnetic head, through recording test data on the magnetic recording medium and reproducing recorded test data therefrom by means of the magnetic headHITACHI HIGH TECH ELECT ENG CO·Filed 2003·Granted May 17, 2005·19 cites·4 claims
- 0685US6798504B2Apparatus and method for inspecting surface of semiconductor wafer or the likeHITACHI HIGH TECH ELECT ENG CO·Filed 2001·Granted Sep 28, 2004·32 cites·13 claims
- 0771US6888918B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH ELECT ENG CO·Filed 2003·Granted May 3, 2005·11 cites·20 claims
- 0867US6887330B2Machine for punching out electronic circuitry parts, method for replacing tape supply reels, and method for producing electronic circuitry parts from tapeHITACHI HIGH TECH ELECT ENG CO·Filed 2003·Granted May 3, 2005·18 cites·8 claims
- 0961US6893329B2Polishing apparatus with abrasive tape, polishing method using abrasive tape and manufacturing method for magnetic diskHITACHI HIGH TECH ELECT ENG CO·Filed 2003·Granted May 17, 2005·10 cites·25 claims
- 1046US6944325B2Inspecting method and apparatus for repeated micro-miniature patternsHITACHI HIGH TECH ELECT ENG CO·Filed 2003·Granted Sep 13, 2005·3 cites·14 claims
- 1137US6911101B2ACF tape feeder machine, and method for feeding ACF tapeHITACHI HIGH TECH ELECT ENG CO·Filed 2003·Granted Jun 28, 2005·1 cites·11 claims
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