Assignee
HITACH HIGH TECHNOLOGIES CORP
JP·2 granted patents·1 pending application·13 citations·filing 2003–2013
Top patents by PatentIndex Score
3 records- 0169US6972848B2Semiconductor fabricating apparatus with function of determining etching processing stateHITACH HIGH TECHNOLOGIES CORP·Filed 2003·Granted Dec 6, 2005·11 cites·5 claims
- 0265US7594175B2Processing instrument and processing instrument systemHITACH HIGH TECHNOLOGIES CORP·Filed 2006·Granted Sep 22, 2009·2 cites·9 claims
- 0356US2015269513A1Automatic analyzerHITACH HIGH TECHNOLOGIES CORP·Filed 2013·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →