Assignee
HIRAYANAGI HIROHISA
JP·1 granted patent·1 pending application·2 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0156US8536539B2Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generatorHIRAYANAGI HIROHISA·Filed 2010·Granted Sep 17, 2013·2 cites·7 claims
- 0226US2012104274A1Ion beam generating apparatus, substrate processing apparatus and method of manufacturing electronic deviceHIRAYANAGI HIROHISA·Filed 2010·Application pending·0 cites
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