Assignee
HEYMANNS MATTHIAS
DE·0 granted patents·2 pending applications·0 citations·filing 2018–2018
Top patents by PatentIndex Score
2 records- 0113US2021335640A1Holding device for holding a carrier or a component in a vacuum chamber, use of a holding device for holding a carrier or a component in a vacuum chamber, apparatus for handling a carrier in a vacuum chamber, and vacuum deposition systemHEYMANNS MATTHIAS·Filed 2018·Application pending·0 cites
- 0212US2021340663A1Apparatus for processing a substrate, system for processing a substrate, and methods thereforHEYMANNS MATTHIAS·Filed 2018·Application pending·0 cites
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