Assignee
HERMES MICROVISION TAIWAN INC
TW·2 granted patents·111 citations·filing 2002–2002
Top patents by PatentIndex Score
2 records- 0194US6815345B2Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturingHERMES MICROVISION TAIWAN INC·Filed 2002·Granted Nov 9, 2004·101 cites·5 claims
- 0271US6791095B2Method and system of using a scanning electron microscope in semiconductor wafer inspection with Z-stage focusHERMES MICROVISION TAIWAN INC·Filed 2002·Granted Sep 14, 2004·10 cites·23 claims
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