Assignee
HERMES MICROVISION INC
TW·100 granted patents·8 pending applications·976 citations·filing 2000–2018
Top patents by PatentIndex Score
108 records- 0198US10141160B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Nov 27, 2018·42 cites·76 claims
- 0298US10062541B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2017·Granted Aug 28, 2018·34 cites·79 claims
- 0398US9922799B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Mar 20, 2018·64 cites·22 claims
- 0498US9691586B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2017·Granted Jun 27, 2017·64 cites·5 claims
- 0598US9691588B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Jun 27, 2017·33 cites·19 claims
- 0698US9607805B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Mar 28, 2017·62 cites·23 claims
- 0798US8748814B1Structure for inspecting defects in word line array fabricated by SADP process and method thereofHERMES MICROVISION INC·Filed 2013·Granted Jun 10, 2014·63 cites·16 claims
- 0897US9436985B1Method and system for enhancing image qualityHERMES MICROVISION INC·Filed 2015·Granted Sep 6, 2016·14 cites·26 claims
- 0995US10236156B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Mar 19, 2019·13 cites·32 claims
- 1095US7872236B2Charged particle detection devicesHERMES MICROVISION INC·Filed 2007·Granted Jan 18, 2011·23 cites·21 claims
- 1195US7105436B2Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturingHERMES MICROVISION INC·Filed 2004·Granted Sep 12, 2006·84 cites·12 claims
- 1295US6392231B1Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and methodHERMES MICROVISION INC·Filed 2000·Granted May 21, 2002·56 cites·47 claims
- 1394US9000395B2Energy filter for charged particle beam apparatusHERMES MICROVISION INC·Filed 2014·Granted Apr 7, 2015·16 cites·6 claims
- 1493US10109456B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2017·Granted Oct 23, 2018·5 cites·26 claims
- 1593US9991147B2Wafer grounding and biasing method, apparatus, and applicationHERMES MICROVISION INC·Filed 2014·Granted Jun 5, 2018·15 cites·22 claims
- 1693US7960697B2Electron beam apparatusHERMES MICROVISION INC·Filed 2008·Granted Jun 14, 2011·24 cites·20 claims
- 1792US10008360B2Objective lens system for fast scanning large FOVHERMES MICROVISION INC·Filed 2016·Granted Jun 26, 2018·6 cites·24 claims
- 1892US9048062B1Method for improving performance of an energy filterHERMES MICROVISION INC·Filed 2015·Granted Jun 2, 2015·8 cites·13 claims
- 1992US8003953B2Multi-axis magnetic lensHERMES MICROVISION INC·Filed 2009·Granted Aug 23, 2011·18 cites·14 claims
- 2092US7825386B2System and method for a charged particle beamHERMES MICROVISION INC·Filed 2007·Granted Nov 2, 2010·16 cites·32 claims
- 2192US7759653B2Electron beam apparatusHERMES MICROVISION INC·Filed 2008·Granted Jul 20, 2010·16 cites·11 claims
- 2291US10115559B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2017·Granted Oct 30, 2018·4 cites·2 claims
- 2391US9002097B1Method and system for enhancing image qualityHERMES MICROVISION INC·Filed 2013·Granted Apr 7, 2015·6 cites·7 claims
- 2491US7928383B2Charged particle system including segmented detection elementsHERMES MICROVISION INC·Filed 2008·Granted Apr 19, 2011·11 cites·20 claims
- 2591US7705301B2Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detectorHERMES MICROVISION INC·Filed 2007·Granted Apr 27, 2010·21 cites·15 claims
- 2690US9113538B2Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet maskHERMES MICROVISION INC·Filed 2013·Granted Aug 18, 2015·9 cites·6 claims
- 2790US7893406B1Electron gun with magnetic immersion double condenser lensesHERMES MICROVISION INC·Filed 2006·Granted Feb 22, 2011·11 cites·16 claims
- 2889US7919760B2Operation stage for wafer edge inspection and reviewHERMES MICROVISION INC·Filed 2008·Granted Apr 5, 2011·15 cites·10 claims
- 2988US9431209B2Apparatus of plural charged particle beams with multi-axis magnetic lensesHERMES-MICROVISION INC·Filed 2015·Granted Aug 30, 2016·5 cites·33 claims
- 3088US8350213B2Charged particle beam detection unit with multi type detection subunitsHERMES MICROVISION INC·Filed 2010·Granted Jan 8, 2013·7 cites·16 claims
- 3187US10054556B2Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet maskHERMES MICROVISION INC·Filed 2016·Granted Aug 21, 2018·3 cites·17 claims
- 3287US9048063B1Electron beam apparatusHERMES MICROVISION INC·Filed 2015·Granted Jun 2, 2015·5 cites·15 claims
- 3386US10088438B2Method and system for inspecting an EUV maskHERMES MICROVISION INC·Filed 2016·Granted Oct 2, 2018·2 cites·13 claims
- 3486US9953803B2Local alignment point calibration method in die inspectionHERMES MICROVISION INC·Filed 2016·Granted Apr 24, 2018·3 cites·24 claims
- 3586US9583306B2Swing objective lensHERMES MICROVISION INC·Filed 2015·Granted Feb 28, 2017·4 cites·17 claims
- 3686US9541824B1Method and system for fast inspecting defectsHERMES MICROVISION INC·Filed 2014·Granted Jan 10, 2017·7 cites·12 claims
- 3786US9536697B2System and method for calibrating charge-regulating moduleHERMES MICROVISION INC·Filed 2015·Granted Jan 3, 2017·4 cites·21 claims
- 3886US9437395B2Method and compound system for inspecting and reviewing defectsHERMES MICROVISION INC·Filed 2015·Granted Sep 6, 2016·4 cites·21 claims
- 3985US10274537B2Test device for defect inspectionHERMES MICROVISION INC·Filed 2016·Granted Apr 30, 2019·4 cites·24 claims
- 4085US9282293B2Method and system for measuring critical dimension and monitoring fabrication uniformityHERMES MICROVISION INC·Filed 2013·Granted Mar 8, 2016·4 cites·14 claims
- 4184US9400176B2Dynamic focus adjustment with optical height detection apparatus in electron beam systemHERMES MICROVISION INC·Filed 2014·Granted Jul 26, 2016·4 cites·13 claims
- 4284US9117626B1Energy-discrimination detection deviceHERMES MICROVISION INC·Filed 2015·Granted Aug 25, 2015·3 cites·14 claims
- 4384US9000370B2System and method for controlling charge-up in an electron beam apparatusHERMES MICROVISION INC·Filed 2014·Granted Apr 7, 2015·4 cites·2 claims
- 4483US10276347B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2018·Granted Apr 30, 2019·1 cites·5 claims
- 4583US10102619B1Inspection method and systemHERMES MICROVISION INC·Filed 2015·Granted Oct 16, 2018·4 cites·55 claims
- 4683US9105440B2Apparatus of plural charged particle beams with multi-axis magnetic lensHERMES MICROVISION INC·Filed 2014·Granted Aug 11, 2015·5 cites·24 claims
- 4783US8618480B2Charged particle beam apparatusHERMES MICROVISION INC·Filed 2013·Granted Dec 31, 2013·6 cites·29 claims
- 4883US6960766B2Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and methodHERMES MICROVISION INC·Filed 2003·Granted Nov 1, 2005·18 cites·26 claims
- 4983US6605805B2Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and methodHERMES MICROVISION INC·Filed 2002·Granted Aug 12, 2003·16 cites·3 claims
- 5082US10468227B2Charged particle sourceHERMES MICROVISION INC·Filed 2018·Granted Nov 5, 2019·1 cites·13 claims
Showing the top 50 of 108 patent records by PatentIndex Score.
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