Assignee
HEMPENIUS PETER PAUL
NL·2 granted patents·5 citations·filing 2009–2009
Top patents by PatentIndex Score
2 records- 0170US8928860B2Lithographic apparatus having a chuck with a visco-elastic damping layerHEMPENIUS PETER PAUL·Filed 2009·Granted Jan 6, 2015·4 cites·25 claims
- 0258US8310651B2Lithographic apparatus, method and device manufacturing methodHEMPENIUS PETER PAUL·Filed 2009·Granted Nov 13, 2012·1 cites·6 claims
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