Assignee
HASEBE KAZUHIDE
JP·8 granted patents·5 pending applications·258 citations·filing 2004–2011
Top patents by PatentIndex Score
13 records- 0197US8080290B2Film formation method and apparatus for semiconductor processHASEBE KAZUHIDE·Filed 2009·Granted Dec 20, 2011·109 cites·12 claims
- 0296US8119544B2Film formation method and apparatus for semiconductor processHASEBE KAZUHIDE·Filed 2009·Granted Feb 21, 2012·130 cites·13 claims
- 0393US8426117B2Mask pattern forming method, fine pattern forming method, and film deposition apparatusHASEBE KAZUHIDE·Filed 2009·Granted Apr 23, 2013·12 cites·17 claims
- 0479US8168270B2Film formation method and apparatus for semiconductor processHASEBE KAZUHIDE·Filed 2007·Granted May 1, 2012·3 cites·20 claims
- 0569US9006021B2Amorphous silicon film formation method and amorphous silicon film formation apparatusHASEBE KAZUHIDE·Filed 2011·Granted Apr 14, 2015·2 cites·14 claims
- 0669US8940097B2Vertical heat treatment apparatusHASEBE KAZUHIDE·Filed 2011·Granted Jan 27, 2015·2 cites·3 claims
- 0757US2006207504A1Film formation method and apparatus for semiconductor processHASEBE KAZUHIDE·Filed 2006·Application pending·0 cites
- 0856US2005282365A1Film formation apparatus and method for semiconductor processHASEBE KAZUHIDE·Filed 2005·Application pending·0 cites
- 0950US8728957B2Thin film formation method and film formation apparatusHASEBE KAZUHIDE·Filed 2011·Granted May 20, 2014·0 cites·9 claims
- 1046US8124181B2Oxidation method providing parallel gas flow over substrates in a semiconductor processHASEBE KAZUHIDE·Filed 2007·Granted Feb 28, 2012·0 cites·14 claims
- 1140US2006021570A1Reduction in size of hemispherical grains of hemispherical grained filmHASEBE KAZUHIDE·Filed 2005·Application pending·0 cites
- 1239US2006216949A1Method for cleaning heat treatment apparatusHASEBE KAZUHIDE·Filed 2004·Application pending·0 cites
- 1339US2006213539A1Method for cleaning thin-film forming apparatusHASEBE KAZUHIDE·Filed 2004·Application pending·0 cites
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