Assignee
GRAY SCALE TECHNOLOGIES INC
US·2 granted patents·60 citations·filing 1999–2001
Top patents by PatentIndex Score
2 records- 0181US6524755B2Phase-shift masks and methods of fabricationGRAY SCALE TECHNOLOGIES INC·Filed 2001·Granted Feb 25, 2003·25 cites·53 claims
- 0270US6534221B2Method for fabricating continuous space variant attenuating lithography mask for fabrication of devices with three-dimensional structures and microelectronicsGRAY SCALE TECHNOLOGIES INC·Filed 1999·Granted Mar 18, 2003·35 cites·22 claims
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