Assignee
GENITECH CO LTD
US·3 granted patents·343 citations·filing 1999–1999
Top patents by PatentIndex Score
3 records- 0196US6623799B1Chemical vapor deposition method using a catalyst on a substrate surfaceGENITECH CO LTD·Filed 1999·Granted Sep 23, 2003·296 cites·4 claims
- 0276US6432205B1Gas feeding system for chemical vapor deposition reactor and method of controlling the sameGENITECH CO LTD·Filed 1999·Granted Aug 13, 2002·33 cites·9 claims
- 0347US6426117B1Method for forming a three-component nitride film containing metal and siliconGENITECH CO LTD·Filed 1999·Granted Jul 30, 2002·14 cites·20 claims
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