Assignee
GAGE CHRIS
US·3 granted patents·586 citations·filing 2007–2011
Top patents by PatentIndex Score
3 records- 0196US8060252B2High throughput method of in transit wafer position correction in system using multiple robotsGAGE CHRIS·Filed 2007·Granted Nov 15, 2011·571 cites·19 claims
- 0291US8489237B2High throughput method of in transit wafer position correction in a system using multiple robotsGAGE CHRIS·Filed 2011·Granted Jul 16, 2013·12 cites·16 claims
- 0375US8491248B2Loadlock designs and methods for using sameGAGE CHRIS·Filed 2011·Granted Jul 23, 2013·3 cites·12 claims
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