Assignee
GAFF KEITH WILLIAM
US·4 granted patents·144 citations·filing 2010–2011
Top patents by PatentIndex Score
4 records- 0197US8624168B2Heating plate with diode planar heater zones for semiconductor processingGAFF KEITH WILLIAM·Filed 2011·Granted Jan 7, 2014·57 cites·17 claims
- 0297US8461674B2Thermal plate with planar thermal zones for semiconductor processingGAFF KEITH WILLIAM·Filed 2011·Granted Jun 11, 2013·63 cites·18 claims
- 0395US8642480B2Adjusting substrate temperature to improve CD uniformityGAFF KEITH WILLIAM·Filed 2010·Granted Feb 4, 2014·22 cites·16 claims
- 0473US8449174B2Method and apparatus for chuck thermal calibrationGAFF KEITH WILLIAM·Filed 2010·Granted May 28, 2013·2 cites·9 claims
Join the waitlist — get patent alerts
Get an alert when GAFF KEITH WILLIAM files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →