Assignee
FUNK MERRITT
US·4 granted patents·1 pending application·27 citations·filing 2006–2012
Top patents by PatentIndex Score
5 records- 0189US8816281B2Ion energy analyzer and methods of manufacturing the sameFUNK MERRITT·Filed 2012·Granted Aug 26, 2014·16 cites·20 claims
- 0288US9087677B2Methods of electrical signaling in an ion energy analyzerFUNK MERRITT·Filed 2012·Granted Jul 21, 2015·8 cites·20 claims
- 0368US8183062B2Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequencesFUNK MERRITT·Filed 2009·Granted May 22, 2012·3 cites·19 claims
- 0444US9151286B2Processing chamber integrated pressure controlFUNK MERRITT·Filed 2012·Granted Oct 6, 2015·0 cites·14 claims
- 0542US2007238201A1Dynamic metrology sampling with wafer uniformity controlFUNK MERRITT·Filed 2006·Application pending·0 cites
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