Assignee
FUKAO MASATO
JP·3 granted patents·6 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0177US8298340B2Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition methodFUKAO MASATO·Filed 2011·Granted Oct 30, 2012·5 cites·9 claims
- 0259US8470403B2Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition methodFUKAO MASATO·Filed 2012·Granted Jun 25, 2013·1 cites·2 claims
- 0342US8226802B2Thin film forming apparatus, film thickness measuring method and film thickness sensorFUKAO MASATO·Filed 2010·Granted Jul 24, 2012·0 cites·2 claims
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