Assignee
FUJIMOTO JUNICHI
JP·4 granted patents·1 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0162US8611393B2Laser apparatusFUJIMOTO JUNICHI·Filed 2012·Granted Dec 17, 2013·1 cites·20 claims
- 0250US8813329B2Chamber replacing methodFUJIMOTO JUNICHI·Filed 2011·Granted Aug 26, 2014·0 cites·17 claims
- 0346US9147993B2Master oscillator system and laser apparatusFUJIMOTO JUNICHI·Filed 2012·Granted Sep 29, 2015·0 cites·7 claims
- 0443US8809821B2Holder device, chamber apparatus, and extreme ultraviolet light generation systemFUJIMOTO JUNICHI·Filed 2012·Granted Aug 19, 2014·0 cites·24 claims
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