Assignee
FUGEN CO LTD
KR·1 granted patent·2 pending applications·1 citations·filing 2015–2021
Top patents by PatentIndex Score
3 records- 0162US11398390B2Pendulum valveFUGEN CO LTD·Filed 2021·Granted Jul 26, 2022·1 cites·3 claims
- 0213US2017175904A1Rectangular gate vacuum valve assembly, method for operating the assembly and semiconductor manufacturing apparatus including the assemblyFUGEN CO LTD·Filed 2015·Application pending·0 cites
- 0311US2017159830A1Rectangular gate vacuum valve assembly, and semiconductor manufacturing apparatus including the assemblyFUGEN CO LTD·Filed 2016·Application pending·0 cites
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