Assignee
FTS CORP
JP·3 granted patents·1 pending application·20 citations·filing 2001–2005
Top patents by PatentIndex Score
4 records- 0173US6881311B2Facing-targets-type sputtering apparatusFTS CORP·Filed 2002·Granted Apr 19, 2005·15 cites·25 claims
- 0258US6911123B2Facing-targets-type sputtering apparatus and methodFTS CORP·Filed 2001·Granted Jun 28, 2005·4 cites·17 claims
- 0349US2007187234A1Facing-targets type sputtering apparatusFTS CORP·Filed 2005·Application pending·0 cites
- 0447US7135097B2Box-shaped facing-targets sputtering apparatus and method for producing compound thin filmFTS CORP·Filed 2003·Granted Nov 14, 2006·1 cites·22 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →