Assignee
FSI INT INC
US·91 granted patents·3 pending applications·5,403 citations·filing 1987–2012
Top patents by PatentIndex Score
94 records- 0197US6884066B2Thermal process station with heated lidFSI INT INC·Filed 2003·Granted Apr 26, 2005·553 cites·21 claims
- 0296US4900395AHF gas etching of wafers in an acid processorFSI INT INC·Filed 1989·Granted Feb 13, 1990·332 cites·26 claims
- 0395US6072163ACombination bake/chill apparatus incorporating low thermal mass, thermally conductive bakeplateFSI INT INC·Filed 1998·Granted Jun 6, 2000·692 cites·87 claims
- 0494US6308776B1Temperature control apparatus with recirculated coolantFSI INT INC·Filed 1998·Granted Oct 30, 2001·156 cites·10 claims
- 0594US5418382ASubstrate location and detection apparatusFSI INT INC·Filed 1993·Granted May 23, 1995·473 cites·22 claims
- 0693US6639189B2Heating member for combination heating and chilling apparatus, and methodsFSI INT INC·Filed 2002·Granted Oct 28, 2003·97 cites·20 claims
- 0793US6299724B1Direct vapor delivery of enabling chemical for enhanced HF etch process performanceFSI INT INC·Filed 2000·Granted Oct 9, 2001·75 cites·7 claims
- 0892US7476616B2Reagent activator for electroless platingFSI INT INC·Filed 2005·Granted Jan 13, 2009·17 cites·16 claims
- 0992US6694224B2Control of robotic systemsFSI INT INC·Filed 2002·Granted Feb 17, 2004·52 cites·18 claims
- 1091US7819984B2Process for treatment of substrates with water vapor or steamFSI INT INC·Filed 2008·Granted Oct 26, 2010·17 cites·6 claims
- 1191US5971368ASystem to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilizedFSI INT INC·Filed 1997·Granted Oct 26, 1999·121 cites·14 claims
- 1290US5522660AApparatus for blending and controlling the concentration of a liquid chemical in a diluent liquidFSI INT INC·Filed 1994·Granted Jun 4, 1996·136 cites·6 claims
- 1389US6529686B2Heating member for combination heating and chilling apparatus, and methodsFSI INT INC·Filed 2001·Granted Mar 4, 2003·50 cites·59 claims
- 1489US5169408AApparatus for wafer processing with in situ rinseFSI INT INC·Filed 1990·Granted Dec 8, 1992·201 cites·14 claims
- 1588US7592264B2Process for removing material from substratesFSI INT INC·Filed 2006·Granted Sep 22, 2009·13 cites·43 claims
- 1688US6080531AOrganic removal processFSI INT INC·Filed 1998·Granted Jun 27, 2000·92 cites·22 claims
- 1787US7913706B2Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatusesFSI INT INC·Filed 2008·Granted Mar 29, 2011·14 cites·10 claims
- 1887US6124211ACleaning methodFSI INT INC·Filed 1995·Granted Sep 26, 2000·89 cites·21 claims
- 1987US4874014AFlow control manifoldFSI INT INC·Filed 1987·Granted Oct 17, 1989·57 cites·14 claims
- 2086US7681581B2Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluidsFSI INT INC·Filed 2006·Granted Mar 23, 2010·14 cites·24 claims
- 2186US6996456B2Robot with tactile sensor deviceFSI INT INC·Filed 2003·Granted Feb 7, 2006·86 cites·24 claims
- 2286US6979165B2Reduced footprint tool for automated processing of microelectronic substratesFSI INT INC·Filed 2002·Granted Dec 27, 2005·44 cites·18 claims
- 2386US6648307B2Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilizedFSI INT INC·Filed 2002·Granted Nov 18, 2003·50 cites·10 claims
- 2486US5924794AChemical blending system with titrator controlFSI INT INC·Filed 1995·Granted Jul 20, 1999·91 cites·40 claims
- 2585US6065481ADirect vapor delivery of enabling chemical for enhanced HF etch process performanceFSI INT INC·Filed 1997·Granted May 23, 2000·100 cites·19 claims
- 2685US6015503AMethod and apparatus for surface conditioningFSI INT INC·Filed 1995·Granted Jan 18, 2000·89 cites·23 claims
- 2785US5961732ATreating substrates by producing and controlling a cryogenic aerosolFSI INT INC·Filed 1997·Granted Oct 5, 1999·92 cites·11 claims
- 2884US6875289B2Semiconductor wafer cleaning systems and methodsFSI INT INC·Filed 2002·Granted Apr 5, 2005·37 cites·14 claims
- 2984US6307184B1Thermal processing chamber for heating and cooling wafer-like objectsFSI INT INC·Filed 1999·Granted Oct 23, 2001·71 cites·29 claims
- 3084US5355048AMegasonic transducer for cleaning substrate surfacesFSI INT INC·Filed 1993·Granted Oct 11, 1994·96 cites·18 claims
- 3184US4857142AMethod and apparatus for controlling simultaneous etching of front and back sides of wafersFSI INT INC·Filed 1988·Granted Aug 15, 1989·72 cites·18 claims
- 3283US6822413B2Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effectorFSI INT INC·Filed 2003·Granted Nov 23, 2004·43 cites·23 claims
- 3381US7364625B2Rinsing processes and equipmentFSI INT INC·Filed 2002·Granted Apr 29, 2008·31 cites·10 claims
- 3481US6423947B2Thermal processing chamber for heating and cooling wafer-like objectsFSI INT INC·Filed 2001·Granted Jul 23, 2002·27 cites·6 claims
- 3580US7312161B2Advanced process control for low variation treatment in immersion processingFSI INT INC·Filed 2006·Granted Dec 25, 2007·7 cites·20 claims
- 3680US5431700AVertical multi-process bake/chill apparatusFSI INT INC·Filed 1994·Granted Jul 11, 1995·89 cites·7 claims
- 3779US5810942AAerodynamic aerosol chamberFSI INT INC·Filed 1996·Granted Sep 22, 1998·63 cites·30 claims
- 3878US7025831B1Apparatus for surface conditioningFSI INT INC·Filed 1999·Granted Apr 11, 2006·57 cites·14 claims
- 3978US6221781B1Combined process chamber with multi-positionable pedestalFSI INT INC·Filed 1999·Granted Apr 24, 2001·73 cites·20 claims
- 4077US6835667B2Method for etching high-k films in solutions comprising dilute fluoride speciesFSI INT INC·Filed 2002·Granted Dec 28, 2004·24 cites·34 claims
- 4177US6681781B2Methods for cleaning microelectronic substrates using ultradilute cleaning liquidsFSI INT INC·Filed 1999·Granted Jan 27, 2004·51 cites·12 claims
- 4277US6383724B1Organic removal processFSI INT INC·Filed 2000·Granted May 7, 2002·19 cites·26 claims
- 4376US6797063B2Dispensing apparatusFSI INT INC·Filed 2002·Granted Sep 28, 2004·17 cites·20 claims
- 4474US6465374B1Method of surface preparationFSI INT INC·Filed 2000·Granted Oct 15, 2002·18 cites·21 claims
- 4573US7235495B2Controlled growth of highly uniform, oxide layers, especially ultrathin layersFSI INT INC·Filed 2004·Granted Jun 26, 2007·13 cites·17 claims
- 4673US6406551B1Method for treating a substrate with heat sensitive agentsFSI INT INC·Filed 1999·Granted Jun 18, 2002·42 cites·23 claims
- 4773US5632866APoint-of-use recycling of wafer cleaning substancesFSI INT INC·Filed 1994·Granted May 27, 1997·26 cites·13 claims
- 4872US6274506B1Apparatus and method for dispensing processing fluid toward a substrate surfaceFSI INT INC·Filed 1999·Granted Aug 14, 2001·39 cites·22 claims
- 4972US6221168B1HF/IPA based process for removing undesired oxides form a substrateFSI INT INC·Filed 1998·Granted Apr 24, 2001·43 cites·29 claims
- 5071US6578369B2Nozzle design for generating fluid streams useful in the manufacture of microelectronic devicesFSI INT INC·Filed 2001·Granted Jun 17, 2003·23 cites·17 claims
Showing the top 50 of 94 patent records by PatentIndex Score.
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