Assignee
FREYWALD KARLHEINZ
DE·1 granted patent·2 pending applications·1 citations·filing 2003–2007
Top patents by PatentIndex Score
3 records- 0136US8742536B2SOI disks comprising MEMS structures and filled isolating trenches having a defined cross-sectionFREYWALD KARLHEINZ·Filed 2005·Granted Jun 3, 2014·1 cites·7 claims
- 0223US2011012236A1Evaluation of an undercut of deep trench structures in soi wafersFREYWALD KARLHEINZ·Filed 2007·Application pending·0 cites
- 0320US2006199298A1Creation of hermetically sealed dielectrically isolating trenchesFREYWALD KARLHEINZ·Filed 2003·Application pending·0 cites
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