Assignee
FREIMANN ROLF
DE·5 granted patents·28 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0191US8908149B2Projection exposure system and use thereofFREIMANN ROLF·Filed 2008·Granted Dec 9, 2014·15 cites·20 claims
- 0278US8537333B2Optical imaging device with image defect determinationFREIMANN ROLF·Filed 2011·Granted Sep 17, 2013·2 cites·23 claims
- 0376US8228485B2Projection illumination systemFREIMANN ROLF·Filed 2008·Granted Jul 24, 2012·7 cites·32 claims
- 0463US8593642B2Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring deviceFREIMANN ROLF·Filed 2012·Granted Nov 26, 2013·2 cites·13 claims
- 0559US8537332B2Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distributionFREIMANN ROLF·Filed 2009·Granted Sep 17, 2013·2 cites·21 claims
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