Assignee
FM IND INC
US·12 granted patents·124 citations·filing 1989–2016
Top patents by PatentIndex Score
12 records- 0180US10388492B2Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings thereforFM IND INC·Filed 2016·Granted Aug 20, 2019·2 cites·15 claims
- 0277US5893419AHydraulic impact toolFM IND INC·Filed 1997·Granted Apr 13, 1999·47 cites·7 claims
- 0357US9790581B2Emissivity controlled coatings for semiconductor chamber componentsFM IND INC·Filed 2014·Granted Oct 17, 2017·0 cites·23 claims
- 0456US4966499AVibratory compactorFM IND INC·Filed 1989·Granted Oct 30, 1990·18 cites·17 claims
- 0552US5586669ACushioning unit fault detectorFM IND INC·Filed 1995·Granted Dec 24, 1996·18 cites·20 claims
- 0649US5642823ARailcar shock absorber with neutral positionFM IND INC·Filed 1996·Granted Jul 1, 1997·15 cites·18 claims
- 0736US9543183B2Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing sameFM IND INC·Filed 2013·Granted Jan 10, 2017·0 cites·24 claims
- 0834US5025938ARail car cushion slider valveFM IND INC·Filed 1989·Granted Jun 25, 1991·8 cites·7 claims
- 0933US6237733B1Internal neutral positioning spring for railcar shock absorberFM IND INC·Filed 1998·Granted May 29, 2001·6 cites·20 claims
- 1033US5762214ARailcar shock absorber backstopFM IND INC·Filed 1997·Granted Jun 9, 1998·5 cites·11 claims
- 1130USD389093SRailcar hydraulic shock absorber backstopFM IND INC·Filed 1997·Granted Jan 13, 1998·1 cites·1 claims
- 1229US5551581ASingle acting sliding sill cushioning unitFM IND INC·Filed 1994·Granted Sep 3, 1996·4 cites·11 claims
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