Assignee
FENG HANYING
US·4 granted patents·67 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0196US8918742B2Methods and systems for pattern design with tailored response to wavefront aberrationFENG HANYING·Filed 2012·Granted Dec 23, 2014·23 cites·21 claims
- 0296US8560978B2Pattern-dependent proximity matching/tuning including light manipulation by projection opticsFENG HANYING·Filed 2011·Granted Oct 15, 2013·15 cites·20 claims
- 0392US8893060B2Optimization of source, mask and projection opticsFENG HANYING·Filed 2011·Granted Nov 18, 2014·18 cites·20 claims
- 0490US8745551B2Pattern-independent and hybrid matching/tuning including light manipulation by projection opticsFENG HANYING·Filed 2011·Granted Jun 3, 2014·11 cites·20 claims
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