Assignee
FEMTOTOOLS AG
CH·4 granted patents·15 citations·filing 2012–2018
Top patents by PatentIndex Score
4 records- 0190US9535086B2Interface of a microfabricated scanning force sensor for combined force and position sensingFEMTOTOOLS AG·Filed 2015·Granted Jan 3, 2017·9 cites·10 claims
- 0268US8984966B2Sub-millinewton capacitive MEMS force sensor for mechanical testing on a microscopeFEMTOTOOLS AG·Filed 2012·Granted Mar 24, 2015·4 cites·6 claims
- 0353US11307125B2MEMS nanoindenter chip with indenter probe and reference probeFEMTOTOOLS AG·Filed 2018·Granted Apr 19, 2022·0 cites·13 claims
- 0452US9575093B2System for the combined, probe-based mechanical and electrical testing of MEMSFEMTOTOOLS AG·Filed 2014·Granted Feb 21, 2017·2 cites·22 claims
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