Assignee
FARNSWORTH WINDY LYNN
US·2 granted patents·6 citations·filing 2008–2009
Top patents by PatentIndex Score
2 records- 0161US8625070B2Lithographic apparatus, projection system and damper for use in a lithographic apparatus and device manufacturing methodFARNSWORTH WINDY LYNN·Filed 2008·Granted Jan 7, 2014·3 cites·13 claims
- 0257US8947634B2Apparatus for supporting an optical element, and method of making sameFARNSWORTH WINDY LYNN·Filed 2009·Granted Feb 3, 2015·3 cites·20 claims
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