Assignee
FANG CHENG CHIA
TW·0 granted patents·6 pending applications·0 citations·filing 2011–2012
Top patents by PatentIndex Score
6 records- 0141US2013291795A1Thin film deposition system with cooling moduleFANG CHENG CHIA·Filed 2012·Application pending·0 cites
- 0241US2012247392A1Multichamber thin-film deposition apparatus and gas-exhausting moduleFANG CHENG CHIA·Filed 2012·Application pending·0 cites
- 0340US2012321790A1Rotation system for thin film formationFANG CHENG CHIA·Filed 2012·Application pending·0 cites
- 0439US2013239894A1Chemical vapor deposition apparatusFANG CHENG CHIA·Filed 2012·Application pending·0 cites
- 0539US2013133579A1Gas preheating system for chemical vapor depositionFANG CHENG CHIA·Filed 2011·Application pending·0 cites
- 0630US2012321787A1Rotation system for thin film formation and method thereofFANG CHENG CHIA·Filed 2011·Application pending·0 cites
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