Assignee
FAGUET JACQUES
US·3 granted patents·44 citations·filing 2005–2011
Top patents by PatentIndex Score
3 records- 0195US9157152B2Vapor deposition systemFAGUET JACQUES·Filed 2011·Granted Oct 13, 2015·12 cites·17 claims
- 0295US8163087B2Plasma enhanced atomic layer deposition system and methodFAGUET JACQUES·Filed 2005·Granted Apr 24, 2012·29 cites·11 claims
- 0374US8815014B2Method and system for performing different deposition processes within a single chamberFAGUET JACQUES·Filed 2011·Granted Aug 26, 2014·3 cites·15 claims
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