Assignee
EVATECH CO LTD
JP·0 granted patents·3 pending applications·0 citations·filing 2008–2009
Top patents by PatentIndex Score
3 records- 0142US2011220026A1Plasma processing deviceEVATECH CO LTD·Filed 2009·Application pending·0 cites
- 0237US2010272550A1Substrate holding mechanism, substrate delivering/receiving mechanism, and substrate processing apparatusEVATECH CO LTD·Filed 2008·Application pending·0 cites
- 0330US2010243163A1Substrate processing apparatusEVATECH CO LTD·Filed 2008·Application pending·0 cites
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