Assignee
EUGENUS INC
US·18 granted patents·19 pending applications·23 citations·filing 2017–2025
Top patents by PatentIndex Score
37 records- 0192US12165918B2Conformal titanium nitride-based thin films and methods of forming sameEUGENUS INC·Filed 2022·Granted Dec 10, 2024·2 cites·19 claims
- 0289US11832537B2Titanium silicon nitride barrier layerEUGENUS INC·Filed 2019·Granted Nov 28, 2023·3 cites·24 claims
- 0389US11482413B2Conformal and smooth titanium nitride layers and methods of forming the sameEUGENUS INC·Filed 2019·Granted Oct 25, 2022·5 cites·23 claims
- 0486US12325914B2Precursor delivery system and method for cyclic depositionEUGENUS INC·Filed 2022·Granted Jun 10, 2025·1 cites·21 claims
- 0585US11587784B2Smooth titanium nitride layers and methods of forming the sameEUGENUS INC·Filed 2019·Granted Feb 21, 2023·3 cites·15 claims
- 0685US2026096357A1Titanium silicon nitride barrier layerEUGENUS INC·Filed 2025·Application pending·0 cites
- 0784US12444648B2Conformal titanium silicon nitride-based thin films and methods of forming sameEUGENUS INC·Filed 2022·Granted Oct 14, 2025·1 cites·33 claims
- 0884US12431388B2Conformal titanium silicon nitride-based thin films and methods of forming sameEUGENUS INC·Filed 2022·Granted Sep 30, 2025·1 cites·23 claims
- 0982US11401607B2TiSiN coating methodEUGENUS INC·Filed 2017·Granted Aug 2, 2022·2 cites·20 claims
- 1082US11361992B2Conformal titanium nitride-based thin films and methods of forming sameEUGENUS INC·Filed 2019·Granted Jun 14, 2022·3 cites·32 claims
- 1181US12408569B2Titanium silicon nitride barrier layerEUGENUS INC·Filed 2023·Granted Sep 2, 2025·0 cites·19 claims
- 1278US2026096403A1Conformal titanium silicon nitride-based thin films and methods of forming sameEUGENUS INC·Filed 2025·Application pending·0 cites
- 1378US2026090349A1Conformal titanium silicon nitride-based thin films and methods of forming sameEUGENUS INC·Filed 2025·Application pending·0 cites
- 1477US11942365B2Multi-region diffusion barrier containing titanium, silicon and nitrogenEUGENUS INC·Filed 2018·Granted Mar 26, 2024·2 cites·30 claims
- 1574US2025297364A1Precursor delivery system and method for cyclic depositionEUGENUS INC·Filed 2025·Application pending·0 cites
- 1672US12444603B2Smooth titanium nitride layers and methods of forming the sameEUGENUS INC·Filed 2023·Granted Oct 14, 2025·0 cites·19 claims
- 1772US12308226B2Conformal and smooth titanium nitride layers and methods of forming the sameEUGENUS INC·Filed 2022·Granted May 20, 2025·0 cites·20 claims
- 1870US2023128366A1Liquid precursor injection for thin film depositionEUGENUS INC·Filed 2022·Application pending·0 cites
- 1970US2025087534A1Multi-region diffusion barrier containing titanium, silicon and nitrogenEUGENUS INC·Filed 2024·Application pending·0 cites
- 2069US2023151488A1Tisin coating methodEUGENUS INC·Filed 2022·Application pending·0 cites
- 2168US11459654B2Liquid precursor injection for thin film depositionEUGENUS INC·Filed 2020·Granted Oct 4, 2022·0 cites·20 claims
- 2268US2024337018A1Corrosion-resistant coatings and methods of producing sameEUGENUS INC·Filed 2024·Application pending·0 cites
- 2367US2025279318A1Conformal and smooth titanium nitride layers and methods of forming the sameEUGENUS INC·Filed 2025·Application pending·0 cites
- 2466US2025115997A1Laser-textured surface and mehods of forming sameEUGENUS INC·Filed 2023·Application pending·0 cites
- 2565US12272599B2Conformal and smooth titanium nitride layers and methods of forming the sameEUGENUS INC·Filed 2021·Granted Apr 8, 2025·0 cites·24 claims
- 2664US12029144B2Encapsulation layer for chalcogenide materialEUGENUS INC·Filed 2021·Granted Jul 2, 2024·0 cites·26 claims
- 2763US2023016016A1Systems and methods of placing substrates in semiconductor manufacturing equipmentEUGENUS INC·Filed 2022·Application pending·0 cites
- 2862US2024124978A1Gas diffuser plate coated with emissivity-controlling thin film and methods of forming sameEUGENUS INC·Filed 2023·Application pending·0 cites
- 2962US2025305118A1Methods and systems for forming highly conformal and low resistivity vanadium nitride thin filmsEUGENUS INC·Filed 2025·Application pending·0 cites
- 3060US2025167044A1Diffusion barrier including metal silicide and titanium silicon nitrideEUGENUS INC·Filed 2024·Application pending·0 cites
- 3160US2024384413A1Showerhead assembly for cyclic vapor deposition with enhanced gas mixingEUGENUS INC·Filed 2024·Application pending·0 cites
- 3257US12283486B2Conformal and smooth titanium nitride layers and methods of forming the sameEUGENUS INC·Filed 2022·Granted Apr 22, 2025·0 cites·24 claims
- 3357US11328944B2Systems and methods of placing substrates in semiconductor manufacturing equipmentEUGENUS INC·Filed 2019·Granted May 10, 2022·0 cites·23 claims
- 3455US2025198002A1Gas hub for multi-station wafer processing systemEUGENUS INC·Filed 2023·Application pending·0 cites
- 3553US2024279801A1Precursor delivery system with selective filtration and method of using sameEUGENUS INC·Filed 2024·Application pending·0 cites
- 3653US2024062993A1Temperature-controlled showerhead assembly for cyclic vapor depositionEUGENUS INC·Filed 2023·Application pending·0 cites
- 3749US2022267898A1Precursor delivery system and method for high speed cyclic depositionEUGENUS INC·Filed 2022·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when EUGENUS INC files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →