Assignee
EUGENE TECHNOLOGY CO LTD
KR·52 granted patents·50 pending applications·98 citations·filing 2003–2024
Top patents by PatentIndex Score
102 records- 0191US10337103B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Jul 2, 2019·5 cites·5 claims
- 0291US10145012B2Substrate processing apparatus and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Dec 4, 2018·12 cites·11 claims
- 0390US10161036B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Dec 25, 2018·4 cites·9 claims
- 0488US9493875B2Shower head unit and chemical vapor deposition apparatusEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Nov 15, 2016·8 cites·18 claims
- 0587US9620395B2Apparatus for processing substrate for supplying reaction gas having phase differenceEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Apr 11, 2017·9 cites·11 claims
- 0684US11111580B2Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2018·Granted Sep 7, 2021·4 cites·12 claims
- 0784US9593415B2Substrate processing apparatus including auxiliary gas supply portEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Mar 14, 2017·7 cites·10 claims
- 0883US10392702B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Aug 27, 2019·5 cites·11 claims
- 0982US9875895B2Substrate processing apparatus including exhaust ports and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Jan 23, 2018·5 cites·3 claims
- 1081US10741396B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Aug 11, 2020·4 cites·9 claims
- 1179US10840118B2Substrate processing apparatus and method for assembling tube assemblyEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Nov 17, 2020·3 cites·8 claims
- 1278US11183372B2Batch type plasma substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2018·Granted Nov 23, 2021·3 cites·9 claims
- 1378US9368380B2Substrate processing device with connection spaceEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Jun 14, 2016·4 cites·8 claims
- 1476US10287687B2Substrate processing deviceEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted May 14, 2019·3 cites·7 claims
- 1576US10229845B2Substrate treatment apparatusEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Mar 12, 2019·4 cites·12 claims
- 1676US9593418B2Showerhead having cooling system and substrate processing apparatus including the showerheadEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Mar 14, 2017·1 cites·10 claims
- 1775US10006121B2Method and apparatus for manufacturing three-dimensional-structure memory deviceEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Jun 26, 2018·1 cites·9 claims
- 1874US10192760B2Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unitEUGENE TECHNOLOGY CO LTD·Filed 2015·Granted Jan 29, 2019·2 cites·3 claims
- 1974US9758870B2Substrate treatment apparatus, and method for controlling temperature of heaterEUGENE TECHNOLOGY CO LTD·Filed 2013·Granted Sep 12, 2017·3 cites·8 claims
- 2073US10364494B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Jul 30, 2019·2 cites·13 claims
- 2172US9869019B2Substrate processing apparatus including processing unitEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Jan 16, 2018·3 cites·13 claims
- 2267US10961626B2Plasma processing apparatus having injection ports at both sides of the ground electrode for batch processing of substratesEUGENE TECHNOLOGY CO LTD·Filed 2018·Granted Mar 30, 2021·1 cites·12 claims
- 2366US2022028658A1Plasma processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2021·Application pending·0 cites
- 2465US2025154650A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 2564US2025163582A1Substrate processing apparatus and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 2661US9953850B2Substrate processing apparatus including heat-shield plateEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Apr 24, 2018·1 cites·4 claims
- 2761US2025163576A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 2859US2023411203A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2023·Application pending·0 cites
- 2958US2025137128A1Process gas supply device and substrate processing system having the sameEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 3057US2026055509A1Batch-type substrate-processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2023·Application pending·0 cites
- 3157US2025066920A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 3256US11702737B2Batch-type substrate processing apparatus and operation method thereofEUGENE TECHNOLOGY CO LTD·Filed 2020·Granted Jul 18, 2023·0 cites·9 claims
- 3356US2025034704A1Substrate processing apparatus and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 3455US10283391B2Multiple gases providing method and multiple gases providing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted May 7, 2019·1 cites·6 claims
- 3555US9818604B2Method for depositing insulating film on recessed portion having high aspect ratioEUGENE TECHNOLOGY CO LTD·Filed 2015·Granted Nov 14, 2017·1 cites·16 claims
- 3655US2020243301A1Plasma processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2018·Application pending·0 cites
- 3755US2015176128A1Substrate Processing ApparatusEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 3855US2023097999A1Showerhead and substrate processing apparatus including the sameEUGENE TECHNOLOGY CO LTD·Filed 2022·Application pending·0 cites
- 3953US12555755B2Batch type substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2023·Granted Feb 17, 2026·0 cites·9 claims
- 4053US2026082850A1Substrate processing apparatus and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2023·Application pending·0 cites
- 4152US12354850B2Apparatus and method for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2023·Granted Jul 8, 2025·0 cites·7 claims
- 4252US12243724B2Batch type substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2023·Granted Mar 4, 2025·0 cites·12 claims
- 4352US2010276393A1Plasma processing apparatus and methodEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 4452US2014331933A1Apparatus for processing apparatus having side pumping typeEUGENE TECHNOLOGY CO LTD·Filed 2012·Application pending·0 cites
- 4552US2010319621A1Plasma processing apparatus and plasma processing methodEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 4652US2021102287A1Thin film deposition apparatus and thin film deposition methodEUGENE TECHNOLOGY CO LTD·Filed 2020·Application pending·0 cites
- 4751US9721798B2Method and apparatus for depositing amorphous silicon filmEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Aug 1, 2017·0 cites·2 claims
- 4850US2018105951A1Equipment for manufacturing semiconductorEUGENE TECHNOLOGY CO LTD·Filed 2017·Application pending·0 cites
- 4949US10593545B2Method for substrate processing using exhaust portsEUGENE TECHNOLOGY CO LTD·Filed 2017·Granted Mar 17, 2020·0 cites·3 claims
- 5049US8030597B2Partition-type heating apparatusEUGENE TECHNOLOGY CO LTD·Filed 2006·Granted Oct 4, 2011·0 cites·14 claims
Showing the top 50 of 102 patent records by PatentIndex Score.
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