Assignee
EPION CORP
US·31 granted patents·3 pending applications·1,776 citations·filing 1989–2006
Top patents by PatentIndex Score
34 records- 0198US7173252B2Ionizer and method for gas-cluster ion-beam formationEPION CORP·Filed 2005·Granted Feb 6, 2007·81 cites·19 claims
- 0298US7060989B2Method and apparatus for improved processing with a gas-cluster ion beamEPION CORP·Filed 2005·Granted Jun 13, 2006·90 cites·23 claims
- 0398US5082359ADiamond films and method of growing diamond films on nondiamond substratesEPION CORP·Filed 1989·Granted Jan 21, 1992·229 cites·33 claims
- 0494US6660340B1Diamond-like carbon film with enhanced adhesionEPION CORP·Filed 2000·Granted Dec 9, 2003·72 cites·32 claims
- 0593US6635883B2Gas cluster ion beam low mass ion filterEPION CORP·Filed 2000·Granted Oct 21, 2003·53 cites·10 claims
- 0693US6486478B1Gas cluster ion beam smoother apparatusEPION CORP·Filed 2000·Granted Nov 26, 2002·126 cites·21 claims
- 0792US7115511B2GCIB processing of integrated circuit interconnect structuresEPION CORP·Filed 2003·Granted Oct 3, 2006·54 cites·35 claims
- 0891US7060988B2Method and apparatus for improved beam stability in high current gas-cluster ion beam processing systemEPION CORP·Filed 2005·Granted Jun 13, 2006·17 cites·23 claims
- 0991US6812147B2GCIB processing to improve interconnection vias and improved interconnection viaEPION CORP·Filed 2002·Granted Nov 2, 2004·54 cites·31 claims
- 1091US6613240B2Method and apparatus for smoothing thin conductive films by gas cluster ion beamEPION CORP·Filed 2000·Granted Sep 2, 2003·64 cites·22 claims
- 1190US6537606B2System and method for improving thin films by gas cluster ion beam processingEPION CORP·Filed 2001·Granted Mar 25, 2003·65 cites·40 claims
- 1289US6646277B2Charging control and dosimetry system for gas cluster ion beamEPION CORP·Filed 2001·Granted Nov 11, 2003·42 cites·13 claims
- 1389US6498107B1Interface control for film deposition by gas-cluster ion-beam processingEPION CORP·Filed 2000·Granted Dec 24, 2002·53 cites·31 claims
- 1489US6375790B1Adaptive GCIB for smoothing surfacesEPION CORP·Filed 1999·Granted Apr 23, 2002·96 cites·9 claims
- 1588US6737643B2Detector and method for cluster ion beam diagnosticsEPION CORP·Filed 2001·Granted May 18, 2004·29 cites·51 claims
- 1688US6416820B1Method for forming carbonaceous hard filmEPION CORP·Filed 1999·Granted Jul 9, 2002·72 cites·12 claims
- 1788US6251835B1Surface planarization of high temperature superconductorsEPION CORP·Filed 1998·Granted Jun 26, 2001·56 cites·56 claims
- 1887US6624081B2Enhanced etching/smoothing of dielectric surfacesEPION CORP·Filed 2001·Granted Sep 23, 2003·36 cites·8 claims
- 1987US6331227B1Enhanced etching/smoothing of dielectric surfacesEPION CORP·Filed 1999·Granted Dec 18, 2001·77 cites·42 claims
- 2086US6750460B2System and method for adjusting the properties of a device by GCIB processingEPION CORP·Filed 2001·Granted Jun 15, 2004·31 cites·38 claims
- 2186US6676989B2Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technologyEPION CORP·Filed 2001·Granted Jan 13, 2004·145 cites·33 claims
- 2284US5042887AHigh energy ultraviolet laser reflector grown on a single crystalline substrateEPION CORP·Filed 1989·Granted Aug 27, 1991·30 cites·16 claims
- 2383US7067828B2Method of and apparatus for measurement and control of a gas cluster ion beamEPION CORP·Filed 2004·Granted Jun 27, 2006·23 cites·34 claims
- 2482US6831272B2Gas cluster ion beam size diagnostics and workpiece processingEPION CORP·Filed 2001·Granted Dec 14, 2004·24 cites·35 claims
- 2582US6629508B2Ionizer for gas cluster ion beam formationEPION CORP·Filed 2000·Granted Oct 7, 2003·18 cites·17 claims
- 2682US6595506B1Apparatus and method for reduced particulate generation during workpiece handlingEPION CORP·Filed 2000·Granted Jul 22, 2003·31 cites·10 claims
- 2780US6770874B2Gas cluster ion beam size diagnostics and workpiece processingEPION CORP·Filed 2001·Granted Aug 3, 2004·16 cites·32 claims
- 2871US6491800B2Method and system for improving the effectiveness of artificial hip joints by the application of gas cluster ion beam technologyEPION CORP·Filed 2001·Granted Dec 10, 2002·51 cites·37 claims
- 2965US6805807B2Adaptive GCIB for smoothing surfacesEPION CORP·Filed 2001·Granted Oct 19, 2004·9 cites·29 claims
- 3063US5855967AMethod of protecting surfaces on diamond, diamondlike carbon or carbonEPION CORP·Filed 1997·Granted Jan 5, 1999·24 cites·13 claims
- 3142US2006292762A1Replacement gate field effect transistor with germanium or SiGe channel and manufacturing method for same using gas-cluster ion irradiationEPION CORP·Filed 2006·Application pending·0 cites
- 3242US2002006877A1Surface planarization of high temperature superconductorsEPION CORP·Filed 2001·Application pending·0 cites
- 3342US2002017454A1Method and system for improving the effectiveness of intraocular lenses by the application of gas cluster ion beam technologyEPION CORP·Filed 2001·Application pending·0 cites
- 3435US6811765B1Thermal treatment of fine grain materials in a coarse-grain fluidized bedEPION CORP·Filed 1998·Granted Nov 2, 2004·8 cites·10 claims
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