Assignee
EOM CHANG-BEOM
US·0 granted patents·3 pending applications·0 citations·filing 2005–2012
Top patents by PatentIndex Score
3 records- 0151US2013327634A1Misaligned sputtering systems for the deposition of complex oxide thin filmsEOM CHANG-BEOM·Filed 2012·Application pending·0 cites
- 0242US2006288928A1Perovskite-based thin film structures on miscut semiconductor substratesEOM CHANG-BEOM·Filed 2005·Application pending·0 cites
- 0336US2013168233A1Apparatus and methods for heteroepitaxial growth using pulsed laser and sputtering deposition with real-time, in situ rheed imagingEOM CHANG-BEOM·Filed 2012·Application pending·0 cites
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