Assignee
EKC TECHNOLOGY K K
JP·3 granted patents·72 citations·filing 2002–2003
Top patents by PatentIndex Score
3 records- 0188US7250391B2Cleaning composition for removing resists and method of manufacturing semiconductor deviceEKC TECHNOLOGY K K·Filed 2003·Granted Jul 31, 2007·56 cites·9 claims
- 0261US7087563B2Resist stripping composition and method of producing semiconductor device using the sameEKC TECHNOLOGY K K·Filed 2002·Granted Aug 8, 2006·9 cites·11 claims
- 0355US6827752B2Cerium oxide slurry, and method of manufacturing substrateEKC TECHNOLOGY K K·Filed 2002·Granted Dec 7, 2004·7 cites·9 claims
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