Assignee
ECHIGO MASATOSHI
JP·10 granted patents·1 pending application·61 citations·filing 2007–2012
Top patents by PatentIndex Score
11 records- 0195US9122153B2Cyclic compound, method for producing same, composition, and method for forming resist patternECHIGO MASATOSHI·Filed 2012·Granted Sep 1, 2015·18 cites·27 claims
- 0292US9316913B2Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation methodECHIGO MASATOSHI·Filed 2012·Granted Apr 19, 2016·15 cites·9 claims
- 0392US8883937B2Cyclic compound, manufacturing method therefor, radiation-sensitive composition, and method for forming a resist patternECHIGO MASATOSHI·Filed 2010·Granted Nov 11, 2014·8 cites·20 claims
- 0483US8846292B2Radiation-sensitive compositionECHIGO MASATOSHI·Filed 2011·Granted Sep 30, 2014·2 cites·11 claims
- 0582US8889919B2Cyclic compound, process for production of the cyclic compound, radiation-sensitive composition, and method for formation of resist patternECHIGO MASATOSHI·Filed 2010·Granted Nov 18, 2014·4 cites·20 claims
- 0679US8110334B2Radiation-sensitive compositionECHIGO MASATOSHI·Filed 2007·Granted Feb 7, 2012·13 cites·4 claims
- 0771US8802353B2Compound for resist and radiation-sensitive composition specificationECHIGO MASATOSHI·Filed 2012·Granted Aug 12, 2014·1 cites·2 claims
- 0863US9598392B2Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefromECHIGO MASATOSHI·Filed 2012·Granted Mar 21, 2017·0 cites·14 claims
- 0950US9150491B2Bicyclohexane derivative compound and manufacturing method of the sameECHIGO MASATOSHI·Filed 2011·Granted Oct 6, 2015·0 cites·6 claims
- 1041US9239517B2Compound, radiation-sensitive composition and resist pattern formation methodECHIGO MASATOSHI·Filed 2011·Granted Jan 19, 2016·0 cites·10 claims
- 1138US2012156615A1Cyclic compound, process for production of the cyclic compound, radiation-sensitive composition, and method for formation of resist patternECHIGO MASATOSHI·Filed 2010·Application pending·0 cites
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