Assignee
DSGI TECH INC
US·2 granted patents·1 pending application·0 citations·filing 2020–2020
Top patents by PatentIndex Score
3 records- 0155US11924952B2Microwave assisted parallel plate e-field applicatorDSGI TECH INC·Filed 2020·Granted Mar 5, 2024·0 cites·6 claims
- 0244US12018374B2System and method of low temperature thin film deposition and in-situ annealingDSGI TECH INC·Filed 2020·Granted Jun 25, 2024·0 cites·16 claims
- 0335US2020286757A1Apparatus for annealing semiconductor integrated circuit wafersDSGI TECH INC·Filed 2020·Application pending·0 cites
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