Assignee

DIAZ ADAUTO

US·2 granted patents·16 citations·filing 2012–2012

Technology mixH01J2 B08B1 C23C1 H01L1 H10P1 Y10T1

Top patents by PatentIndex Score

2 records

0190US8845816B2Method extending the service interval of a gas distribution plateDIAZ ADAUTO·Filed 2012·Granted Sep 30, 2014·8 cites·11 claims
0284US8992689B2Method for removing halogen-containing residues from substrateDIAZ ADAUTO·Filed 2012·Granted Mar 31, 2015·8 cites·6 claims

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