Assignee
DE LA LLERA ANTHONY
US·7 granted patents·623 citations·filing 2010–2012
Top patents by PatentIndex Score
7 records- 0198US8573152B2Showerhead electrodeDE LA LLERA ANTHONY·Filed 2010·Granted Nov 5, 2013·595 cites·17 claims
- 0287US9245716B2Edge-clamped and mechanically fastened inner electrode of showerhead electrode assemblyDE LA LLERA ANTHONY·Filed 2010·Granted Jan 26, 2016·11 cites·12 claims
- 0387US8470127B2Cam-locked showerhead electrode and assemblyDE LA LLERA ANTHONY·Filed 2011·Granted Jun 25, 2013·11 cites·9 claims
- 0471US8847495B2Movable grounding arrangements in a plasma processing chamber and methods thereforDE LA LLERA ANTHONY·Filed 2012·Granted Sep 30, 2014·2 cites·15 claims
- 0571US8709202B2Upper electrode backing member with particle reducing featuresDE LA LLERA ANTHONY·Filed 2010·Granted Apr 29, 2014·2 cites·11 claims
- 0667US9076826B2Plasma confinement ring assembly for plasma processing chambersDE LA LLERA ANTHONY·Filed 2011·Granted Jul 7, 2015·2 cites·23 claims
- 0745US9111731B2Gas feed insert in a plasma processing chamber and methods thereforDE LA LLERA ANTHONY·Filed 2012·Granted Aug 18, 2015·0 cites·21 claims
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