Individual holder
DAVIS MATTHEW F
US·3 granted patents·13 citations·filing 2008–2009
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
3 records- 0181US8232212B2Within-sequence metrology based process tuning for adaptive self-aligned double patterningDAVIS MATTHEW F·Filed 2008·Granted Jul 31, 2012·8 cites·16 claims
- 0256US8089046B2Method and apparatus for calibrating mass flow controllersDAVIS MATTHEW F·Filed 2008·Granted Jan 3, 2012·3 cites·15 claims
- 0355US8274645B2Method and apparatus for in-situ metrology of a workpiece disposed in a vacuum processing chamberDAVIS MATTHEW F·Filed 2009·Granted Sep 25, 2012·2 cites·19 claims
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