Assignee
CYMER LASER TECH
US·18 granted patents·1,823 citations·filing 1988–1996
Top patents by PatentIndex Score
18 records- 0198US5095492ASpectral narrowing techniqueCYMER LASER TECH·Filed 1990·Granted Mar 10, 1992·157 cites·29 claims
- 0298US5025445ASystem for, and method of, regulating the wavelength of a light beamCYMER LASER TECH·Filed 1989·Granted Jun 18, 1991·321 cites·25 claims
- 0398US4959840ACompact excimer laser including an electrode mounted in insulating relationship to wall of the laserCYMER LASER TECH·Filed 1988·Granted Sep 25, 1990·259 cites·21 claims
- 0497US5359620AApparatus for, and method of, maintaining a clean window in a laserCYMER LASER TECH·Filed 1992·Granted Oct 25, 1994·189 cites·32 claims
- 0597US5023884ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jun 11, 1991·204 cites·15 claims
- 0696US5440578AGas replenishment method and apparatus for excimer lasersCYMER LASER TECH·Filed 1993·Granted Aug 8, 1995·119 cites·20 claims
- 0795US5586134AExcimer laserCYMER LASER TECH·Filed 1994·Granted Dec 17, 1996·94 cites·18 claims
- 0893US5450207AMethod and apparatus for calibrating a laser wavelength control mechanismCYMER LASER TECH·Filed 1993·Granted Sep 12, 1995·116 cites·33 claims
- 0993US5377215AExcimer laserCYMER LASER TECH·Filed 1992·Granted Dec 27, 1994·75 cites·97 claims
- 1091US5337330APre-ionizer for a laserCYMER LASER TECH·Filed 1992·Granted Aug 9, 1994·75 cites·36 claims
- 1189US5420877ATemperature compensation method and apparatus for wave meters and tunable lasers controlled therebyCYMER LASER TECH·Filed 1993·Granted May 30, 1995·63 cites·22 claims
- 1279US5048041ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Sep 10, 1991·40 cites·5 claims
- 1364US5596590ABeam diverting shutter for a laser beamCYMER LASER TECH·Filed 1996·Granted Jan 21, 1997·30 cites·13 claims
- 1463US5029177ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jul 2, 1991·21 cites·4 claims
- 1560US5018162ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted May 21, 1991·19 cites·6 claims
- 1655US5018161ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted May 21, 1991·16 cites·5 claims
- 1753US5027366ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jun 25, 1991·15 cites·10 claims
- 1845US5033055ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jul 16, 1991·10 cites·6 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →