Assignee
CTP INC
US·3 granted patents·85 citations·filing 1997–2001
Technology mixH01J3
Top patents by PatentIndex Score
3 records- 0188US6056848AThin film electrostatic shield for inductive plasma processingCTP INC·Filed 1997·Granted May 2, 2000·54 cites·60 claims
- 0285US6312555B1Thin film electrostatic shield for inductive plasma processingCTP INC·Filed 2000·Granted Nov 6, 2001·23 cites·28 claims
- 0371US6554953B2Thin film electrostatic shield for inductive plasma processingCTP INC·Filed 2001·Granted Apr 29, 2003·8 cites·20 claims
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