Assignee
CONCEPT SYSTEMS DESIGN INC
US·3 granted patents·152 citations·filing 1997–1998
Top patents by PatentIndex Score
3 records- 0187US6113984AGas injection system for CVD reactorsCONCEPT SYSTEMS DESIGN INC·Filed 1997·Granted Sep 5, 2000·86 cites·22 claims
- 0270US6031211AZone heating system with feedback controlCONCEPT SYSTEMS DESIGN INC·Filed 1997·Granted Feb 29, 2000·34 cites·21 claims
- 0360US6099650AStructure and method for reducing slip in semiconductor wafersCONCEPT SYSTEMS DESIGN INC·Filed 1998·Granted Aug 8, 2000·32 cites·16 claims
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