Assignee
CHUANG YUNG-HO ALEX
US·2 granted patents·1 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0164US9080991B2Illuminating a specimen for metrology or inspectionCHUANG YUNG-HO ALEX·Filed 2011·Granted Jul 14, 2015·1 cites·27 claims
- 0250US9080990B2Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurementsCHUANG YUNG-HO ALEX·Filed 2009·Granted Jul 14, 2015·0 cites·25 claims
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