Assignee
CHOI DONGSUB
KR·4 granted patents·37 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0193US9709903B2Overlay target geometry for measuring multiple pitchesCHOI DONGSUB·Filed 2012·Granted Jul 18, 2017·15 cites·18 claims
- 0289US10295993B2Method and system for detecting and correcting problematic advanced process control parametersCHOI DONGSUB·Filed 2012·Granted May 21, 2019·14 cites·31 claims
- 0383US8655469B2Advanced process control optimizationCHOI DONGSUB·Filed 2011·Granted Feb 18, 2014·4 cites·15 claims
- 0475US8804137B2Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capabilityCHOI DONGSUB·Filed 2010·Granted Aug 12, 2014·4 cites·21 claims
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