Assignee
CHO SANG-BUM
0 granted patents·3 pending applications·0 citations·filing 2008–2009
Top patents by PatentIndex Score
3 records- 0143US2010193491A1Unit for supporting a substrate and apparatus for processing a substrate having the sameCHO SANG-BUM·Filed 2008·Application pending·0 cites
- 0241US2010104403A1Apparatus for transferring a waferCHO SANG-BUM·Filed 2008·Application pending·0 cites
- 0336US2009293809A1Stage unit for supporting a substrate and apparatus for processing a substrate including the sameCHO SANG-BUM·Filed 2009·Application pending·0 cites
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