Assignee

CHAPMAN INSTR

US·2 granted patents·113 citations·filing 1998–1999

Technology mixG01B2 H10P1

Top patents by PatentIndex Score

2 records

0176US6157450AAutomated optical surface profile measurement systemCHAPMAN INSTR·Filed 1998·Granted Dec 5, 2000·52 cites·14 claims
0271US6342705B1System for locating and measuring an index mark on an edge of a waferCHAPMAN INSTR·Filed 1999·Granted Jan 29, 2002·61 cites·22 claims

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