Assignee
CARLSON DAVID KEITH
US·2 granted patents·12 citations·filing 2008–2011
Top patents by PatentIndex Score
2 records- 0188US8663390B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsCARLSON DAVID KEITH·Filed 2011·Granted Mar 4, 2014·12 cites·21 claims
- 0255US8551415B2UV assisted polymer modification and in situ exhaust cleaningCARLSON DAVID KEITH·Filed 2008·Granted Oct 8, 2013·0 cites·10 claims
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