Individual holder
CARLSON DAVID K
US·6 granted patents·1 pending application·262 citations·filing 2008–2011
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
7 records- 0198US8980005B2Liner assembly for chemical vapor deposition chamberCARLSON DAVID K·Filed 2011·Granted Mar 17, 2015·220 cites·20 claims
- 0297US8960235B2Gas dispersion apparatusCARLSON DAVID K·Filed 2011·Granted Feb 24, 2015·17 cites·18 claims
- 0397US8313804B2Apparatus and methods for chemical vapor depositionCARLSON DAVID K·Filed 2011·Granted Nov 20, 2012·17 cites·18 claims
- 0475US8986454B2Window assembly for use in substrate processing systemsCARLSON DAVID K·Filed 2011·Granted Mar 24, 2015·3 cites·15 claims
- 0571US8813538B2Methods and apparatus for insitu analysis of gases in electronic device fabrication systemsCARLSON DAVID K·Filed 2011·Granted Aug 26, 2014·2 cites·8 claims
- 0665US8337619B2Polymeric coating of substrate processing system components for contamination controlCARLSON DAVID K·Filed 2008·Granted Dec 25, 2012·3 cites·16 claims
- 0748US2013105483A1Apparatus for sublimating solid state precursorsCARLSON DAVID K·Filed 2011·Application pending·0 cites
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