Assignee
CARL ZEISS SMT A G
DE·2 granted patents·107 citations·filing 2004–2007
Top patents by PatentIndex Score
2 records- 0196US7554094B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsCARL ZEISS SMT A G·Filed 2007·Granted Jun 30, 2009·29 cites·23 claims
- 0296US7154676B2Very-high aperture projection objectiveCARL ZEISS SMT A G·Filed 2004·Granted Dec 26, 2006·78 cites·81 claims
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