Individual holder
CARCASI MICHAEL A
US·4 granted patents·5 citations·filing 2006–2011
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
4 records- 0171US8338086B2Method of slimming radiation-sensitive material lines in lithographic applicationsCARCASI MICHAEL A·Filed 2010·Granted Dec 25, 2012·3 cites·18 claims
- 0265US8435728B2Method of slimming radiation-sensitive material lines in lithographic applicationsCARCASI MICHAEL A·Filed 2011·Granted May 7, 2013·2 cites·18 claims
- 0346US8178820B2Method and heat treatment apparatus for uniformly heating a substrate during a bake processCARCASI MICHAEL A·Filed 2008·Granted May 15, 2012·0 cites·13 claims
- 0443US8474468B2Apparatus and method for thermally processing a substrate with a heated liquidCARCASI MICHAEL A·Filed 2006·Granted Jul 2, 2013·0 cites·10 claims
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