Assignee
BUTLER HANS
NL·27 granted patents·117 citations·filing 2008–2012
Top patents by PatentIndex Score
27 records- 0194US8705004B2Lithographic method and apparatusBUTLER HANS·Filed 2010·Granted Apr 22, 2014·20 cites·10 claims
- 0294US8319940B2Position measurement system and lithographic apparatusBUTLER HANS·Filed 2008·Granted Nov 27, 2012·18 cites·22 claims
- 0388US8730451B2Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping methodBUTLER HANS·Filed 2011·Granted May 20, 2014·6 cites·17 claims
- 0488US8164737B2Lithographic apparatus having an active damping subassemblyBUTLER HANS·Filed 2008·Granted Apr 24, 2012·11 cites·17 claims
- 0587US9229339B2Positioning system, a lithographic apparatus and a method for positional controlBUTLER HANS·Filed 2011·Granted Jan 5, 2016·4 cites·9 claims
- 0682US9715171B2Imprint lithographic apparatus and imprint lithographic methodBUTLER HANS·Filed 2010·Granted Jul 25, 2017·4 cites·11 claims
- 0781US8144310B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2009·Granted Mar 27, 2012·5 cites·17 claims
- 0880US9110387B2Lithographic apparatus comprising a substrate table and a surface substrate actuatorBUTLER HANS·Filed 2012·Granted Aug 18, 2015·3 cites·15 claims
- 0980US8553199B2Lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2008·Granted Oct 8, 2013·6 cites·22 claims
- 1079US8243258B2Lithographic apparatus having acoustic resonatorBUTLER HANS·Filed 2008·Granted Aug 14, 2012·5 cites·25 claims
- 1174US9195128B2Enhancing alignment in lithographic apparatus device manufactureBUTLER HANS·Filed 2010·Granted Nov 24, 2015·2 cites·18 claims
- 1274US8908146B2Actuator system, lithographic apparatus, and device manufacturing methodBUTLER HANS·Filed 2009·Granted Dec 9, 2014·3 cites·15 claims
- 1374US8446567B2Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage systemBUTLER HANS·Filed 2009·Granted May 21, 2013·3 cites·19 claims
- 1473US8619232B2Method for damping an object, an active damping system, and a lithographic apparatusBUTLER HANS·Filed 2009·Granted Dec 31, 2013·3 cites·16 claims
- 1573US8059259B2Damping arrangement, active damping system, lithographic apparatus, and projection assemblyBUTLER HANS·Filed 2008·Granted Nov 15, 2011·6 cites·17 claims
- 1671US9378722B2Lithographic apparatus with actuator to compensate acoustic vibrationBUTLER HANS·Filed 2008·Granted Jun 28, 2016·6 cites·28 claims
- 1770US8994919B2Lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2008·Granted Mar 31, 2015·2 cites·18 claims
- 1869US9122173B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2012·Granted Sep 1, 2015·1 cites·16 claims
- 1968US9261799B2Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable objectBUTLER HANS·Filed 2009·Granted Feb 16, 2016·2 cites·30 claims
- 2068US8245824B2Combination of structure and an active damping system, and a lithographic apparatusBUTLER HANS·Filed 2008·Granted Aug 21, 2012·4 cites·20 claims
- 2166US9746312B2Lithographic apparatus and method for measuring a positionBUTLER HANS·Filed 2011·Granted Aug 29, 2017·2 cites·17 claims
- 2264US8743344B2Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second objectBUTLER HANS·Filed 2009·Granted Jun 3, 2014·1 cites·19 claims
- 2358US8913229B2Multi-stage system, a control method therefor, and a lithographic apparatusBUTLER HANS·Filed 2012·Granted Dec 16, 2014·0 cites·15 claims
- 2449US8493553B2Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frameBUTLER HANS·Filed 2009·Granted Jul 23, 2013·0 cites·15 claims
- 2542US8781775B2Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatusBUTLER HANS·Filed 2011·Granted Jul 15, 2014·0 cites·16 claims
- 2641US8922749B2Lithographic apparatus and patterning deviceBUTLER HANS·Filed 2010·Granted Dec 30, 2014·0 cites·12 claims
- 2741US8717532B2Active mount, lithographic apparatus comprising such active mount and method for tuning such active mountBUTLER HANS·Filed 2010·Granted May 6, 2014·0 cites·17 claims
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